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United States Patent | 6,232,580 |
Sandhu | May 15, 2001 |
A gas distribution showerhead for uniformly distributing gas and undistorted radiant heat in an RTP chamber. A gas passageway exists within the showerhead and is suitable for connection to a source of gas. The gas passageway terminates in a plurality of gas ports on a surface of the showerhead. A plurality of energy passageways exist in the showerhead. The energy passageways are exclusive of both the gas passageway and the gas ports, and terminate on the surface of the showerhead. The energy passageways are preferably openings in the showerhead lined with reflectors, although any material which aids in the transmission of the energy may be used. Preferably a plurality of light sources are provided as the energy sources, and they are positioned to transmit light through the energy passageways and out of the surface of the showerhead.
Inventors: | Sandhu; Gurtej S. (Boise, ID) |
Assignee: | Micron Technology, Inc. (Boise, ID) |
Appl. No.: | 549456 |
Filed: | April 14, 2000 |
Current U.S. Class: | 219/390; 34/266; 118/724; 392/416 |
Intern'l Class: | F27B 011/00 |
Field of Search: | 219/390,405,411 392/416,418 118/724,725 34/266,267,273,274 |
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