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United States Patent | 6,160,827 |
Tanaka | December 12, 2000 |
To restrain nonuniformity of irradiation when a linear laser beam is irradiated by scanning the beam, linear laser pulses are irradiated by scanning the pulses in an oblique direction by which irradiation is carried out without overlapping peaks periodically present in the longitudinal direction of the linear laser beam and accordingly, nonuniformity of irradiation can be restrained.
Inventors: | Tanaka; Koichiro (Kanagawa, JP) |
Assignee: | Semiconductor Energy Laboratory, Co., Ltd. (JP) |
Appl. No.: | 032970 |
Filed: | March 2, 1998 |
Feb 28, 1997[JP] | 9-061781 |
Current U.S. Class: | 372/24; 372/25; 372/57; 372/101; 438/166 |
Intern'l Class: | H01S 003/10; H01S 003/22; H01S 003/08; H01L 021/00 |
Field of Search: | 372/24,101,325,57 438/166 |
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5307207 | Apr., 1994 | Ichihara | 359/622. |
5561081 | Oct., 1996 | Takenouchi et al. | 437/174. |
5858822 | Jan., 1999 | Yamazaki et al. | 438/166. |
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