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United States Patent | 6,074,515 |
Iseki ,   et al. | June 13, 2000 |
In a substrate processing apparatus receiving substrates held in a common carrier in a horizontal attitude, the substrates are transferred in the horizontal attitude from the common carrier to an exclusive carrier. The exclusive carrier is rotatable on a horizontal axis. By rotating the exclusive carrier, the substrates are turned from the horizontal attitude to a vertical attitude. Then, the substrates held in the vertical attitude are taken out of the exclusive carrier and transferred to a processing part for processing in the vertical attitude. This allows a simple and speedy turn of the plurality of substrates. Further, even the apparatus for processing the substrates in a vertical attitude can transfer the substrates into and out of the apparatus in the horizontal attitude by using the common carrier.
Inventors: | Iseki; Izuru (Shiga, JP); Sato; Seiichiro (Shiga, JP); Muraoka; Yusuke (Shiga, JP) |
Assignee: | Dainippon Screen Mfg. Co., Ltd. (JP) |
Appl. No.: | 044812 |
Filed: | March 20, 1998 |
Mar 24, 1997[JP] | 9-069666 |
Current U.S. Class: | 156/345.23; 118/73; 118/423; 134/25.1; 134/25.4; 134/61; 134/76; 134/143; 134/902; 414/404; 414/416.09; 414/744.1; 414/936; 414/937; 414/938; 414/940; 414/941 |
Intern'l Class: | C23F 001/02; B08B 013/00; B65G 049/07; B05C 011/00; B05C 003/02 |
Field of Search: | 134/2,3,25.1,25.4,61,76,82,143,902 ;938;940;941 414/331,404,416,419,744.1,744.2,744.3,744.4,744.5,744.6,744.7,744.8,935,936,937 118/73,400,412,423 |
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