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United States Patent | 6,069,390 |
Hsu ,   et al. | May 30, 2000 |
A semiconductor apparatus and method for making the same is disclosed herein in which the semiconductor apparatus includes a first active device formed in a mesa region of semiconductor material formed on one or more sidewalls of an isolation region, and a conductive path which extends from the active device in a linear direction of the mesa. An embodiment is disclosed in which a plurality of active devices are formed in the mesa region and electrically connected thereby.
Inventors: | Hsu; Louis Lu-chen (Fishkill, NY); Mandelman; Jack Allan (Stormville, NY) |
Assignee: | International Business Machines Corporation (Armonk, NY) |
Appl. No.: | 007906 |
Filed: | January 15, 1998 |
Current U.S. Class: | 257/371; 257/374; 257/396; 257/401; 257/623; 257/900; 257/E27.06; 257/E27.062; 438/135 |
Intern'l Class: | H01L 027/088 |
Field of Search: | 257/900,371,374,623,401,396 438/135 |
4688073 | Aug., 1987 | Goth et al. | 357/56. |
5585657 | Dec., 1996 | Efland et al. | 257/335. |
5691549 | Nov., 1997 | Lam et al. | 257/282. |
5814895 | Sep., 1998 | Hirayama | 257/903. |
Foreign Patent Documents | |||
5-110083 | Apr., 1993 | JP. | |
9-116110 | May., 1997 | JP. |