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United States Patent | 6,048,399 |
Tan ,   et al. | April 11, 2000 |
A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.
Inventors: | Tan; En-Tien (Hsinchu, TW); Yang; Ming-Che (Kaohsiung, TW); Huang; Kuo-Feng (Chu-Pei, TW); Cheng; Ching-Chih (Hsinchu Hsien, TW) |
Assignee: | United Microelectronics Corp. (Hsinchu, TW) |
Appl. No.: | 082949 |
Filed: | May 21, 1998 |
Apr 03, 1998[TW] | 87205033 |
Current U.S. Class: | 118/320; 118/52; 427/240 |
Intern'l Class: | B05C 011/02; B05D 003/12 |
Field of Search: | 427/240 118/52,300,320,302 |
5405443 | Apr., 1995 | Akimoto et al. | 118/668. |
5562772 | Oct., 1996 | Neoh | 118/52. |
5763329 | Jun., 1998 | Kariya | 438/780. |
5788773 | Aug., 1998 | Okuda et al. | 118/319. |