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United States Patent | 6,001,005 |
Anderson, III ,   et al. | December 14, 1999 |
A polishing machine includes a platform assembly mounted within three support columns. The platform assembly includes fluidically pressurized bladders for urging the upper polish plate toward and away from the lower polish plate. In one embodiment a movable support column is suspended from an overlying frame. The support column is engaged with the upper polish plate so as to selectively raise and lower the platform assembly. In another embodiment, the platform is raised and lowered by threaded shafts so as to engage and thereby displace the upper polish plate.
Inventors: | Anderson, III; Robert L. (Scottsdale, AZ); Manseau; Michael (Chicago, IL); Derza; Janusz Aleksander (Prospect Heights, IL); Bussan; John Edward (Libertyville, IL) |
Assignee: | Speedfam Corporation (Chandler, AZ) |
Appl. No.: | 071442 |
Filed: | May 1, 1998 |
Current U.S. Class: | 451/268; 451/19 |
Intern'l Class: | B24B 049/08 |
Field of Search: | 451/269,268,262,288,287,290,291,19 |
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SpeedFam-Spitfire Brochure entitled "Double-Sided Abrasive Machining System 360", Copyright 1994. |