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United States Patent | 5,778,913 |
Degani ,   et al. | July 14, 1998 |
Cleaning of a micromimiature high-density flip-chip assembly is carried out by spinning the assembly while applying cleaning fluid to a central portion of the assembly. Confinement of the cleaning fluid to a critical interconnection space of the assembly is ensured by a centrally apertured cover that resiliently engages the top of the assembly. During spinning, cleaning fluid is introduced through the aperture in the cover and is directed into and confined to flow radially in the interconnection space.
Inventors: | Degani; Yinon (Highland Park, NJ); Dudderar; Thomas Dixon (Chatham, NJ); Kossives; Dean Paul (Glen Gardner, NJ) |
Assignee: | Lucent Technologies Inc. (Murray Hill, NJ) |
Appl. No.: | 803474 |
Filed: | February 20, 1997 |
Current U.S. Class: | 134/153; 134/902 |
Intern'l Class: | B08B 003/02 |
Field of Search: | 134/902,33,153 118/52 156/345 L,345 LS |
4021278 | May., 1977 | Hood et al. | 134/902. |
5489341 | Feb., 1996 | Bergman et al. | 134/33. |
Foreign Patent Documents | |||
110674 | Jul., 1982 | JP | 156/345. |
25538 | Jan., 1989 | JP | 134/902. |
164036 | Jun., 1989 | JP | 134/902. |