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United States Patent | 5,774,221 |
Guerra | June 30, 1998 |
Apparatus and methods for providing phase controlled evanescent illumination. The phase controlled evanescent illumination is useful for Imaging, metrology, and energy delivery. The light waves comprising the evanescent electromagnetic field are inhomogeneous in that their planes of equal phase are substantially perpendicular to the direction of propagation and to their planes of constant amplitude. The planes of equal phase are therefore normal to the surface to which the evanescent field is adjacent and to a sample surface illuminated by this field as well. Methods and means for dynamic or static phase shifting of inhomogeneous waves comprising the evanescent field are disclosed.
Inventors: | Guerra; John M. (Concord, MA) |
Assignee: | Polaroid Corporation (Cambridge, MA) |
Appl. No.: | 700810 |
Filed: | August 21, 1996 |
Current U.S. Class: | 356/602; 356/4.01; 977/DIG.1 |
Intern'l Class: | G01B 011/24 |
Field of Search: | 356/4.01,376,371 |
4681451 | Jul., 1987 | Guerra et al. | 356/373. |
5018865 | May., 1991 | Ferrell et al. | 356/376. |
5349443 | Sep., 1994 | Guerra | 356/376. |
5442443 | Aug., 1995 | Guerra | 356/376. |
5479024 | Dec., 1995 | Hillner et al. | 250/458. |
Harrick, N.J., Use of Frustrated Total Internal Reflection to Measure Film Thickness and Surface Reliefs, J. Appl. Phys., 1962, vol. 33, No. 9; pp. 2774-2775. McCutcheon, C.W., "Optical Systems for Observing Surface Topography by Frustrated Total Internal Reflection and by Interference," The Review of Scientific Instruments, 1964, vol. 35, No. 10, pp. 1340-1345. Guerra, J.M. "Photon Tunneling Microscopy," Proceedings from Surface Measurement and Characterization Meeting, Sep. 1988, SPIE vol. 1009, pp. 254-263. G.J. Stoney, "Microscopic Vision," Phil. Mag., 1896, pp. 348-349. Ambrose, E.J., "A Surface Contact Microscope for the Study of Cell Movements," Nature, 24 Nov. 1956, vol. 178, p. 1194. Ambrose, E.J., "The Movement of Fibrocytes," Experimental Cell Research, Suppl. 8, 1961, pp. 54-73. Temple, P.A., "Total internal reflection microscopy: a surface inspection technique," Appl. Optics, vol. 20, No. 15, 1 Aug. 1981, pp. 2656-2664. Axelrod, D., "Total Internal Reflection Fluorescence Microscopy," Methods in Cell Biology, vol. 30, ch. 9, 1989, pp. 256-257. Fischer, U. Ch. et al., "Near-field optical scanning microscopy in reflection," Appl. Phys. Lett., vol. 52, No. 4, 1988, pp. 249-251. Reddick, R.C., "New form of scanning optical microscopy," Phys. Rev. B, vol. 39, No. 1, 1 Jan. 1989, pp. 767-770. Axelrod, D., "Cell-Substrate Contact Illuminated by Total Internal Reflection Fluorescence," J. Cell Biology, vol. 89, Apr. 1981, pp. 141-145 . |