Back to EveryPatent.com
United States Patent | 5,745,236 |
Haga | April 28, 1998 |
An optical inspecting apparatus illuminates a sample with at least one of a parallel light or a diffused light. Light reflected from the sample or light transmitted through the sample is focused by a telecentric optical system and an aperture stop arranged at a back focal plane in the image space of the telecentric optical system. The sample is viewed based on light thus obtained.
Inventors: | Haga; Kazumi (Chofu, JP) |
Assignee: | New Creation Co., Ltd. (Tokyo-to, JP) |
Appl. No.: | 747993 |
Filed: | November 12, 1996 |
May 31, 1994[JP] | 6-141118 |
Current U.S. Class: | 356/600; 356/237.1 |
Intern'l Class: | G01N 021/00 |
Field of Search: | 356/371,394,445,446,121,237,375,376,129 |
3484150 | Dec., 1969 | Taoka et al. | 356/371. |
3782827 | Jan., 1974 | Nisenson et al. | 356/237. |
3815998 | Jun., 1974 | Tietze | 356/371. |
4547073 | Oct., 1985 | Kugimiya | 356/371. |
5048967 | Sep., 1991 | Suzuki et al. | 356/237. |
5155558 | Oct., 1992 | Tannenbaum et al. | 356/446. |
5268735 | Dec., 1993 | Hayashi | 356/239. |
5311599 | May., 1994 | Freischlad | 356/376. |
5461228 | Oct., 1995 | Kirkman et al. | 250/223. |
5497234 | Mar., 1996 | Haga | 356/237. |