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| United States Patent | 5,677,051 |
| Ueda , et al. | October 14, 1997 |
A magnetic recording medium possessing excellent electromagnetic characteristics, corrosion resistance, durability, abrasion resistance and lubricity, has an undercoat layer, a ferromagnetic metal layer, a protective layer and a lubricating layer formed in this order on a non-magnetic substrate, or has an undercoat layer, a ferromagnetic metal layer, an intercepting layer, a protective layer and a lubricating layer formed in this order on a non-magnetic substrate, wherein the protective layer is a plasma-polymerized hydrogen-containing carbon film having a refractive index of 1.90 or more and a contact angle of less than 80 degrees, the film thickness of the protective layer or the total film thickness of the protective layer and the intercepting layer is 30 to 150 .ANG., the undercoat layer, as well as the intercepting layer, is a film formed of silicon oxide represented by SiOx (x=1.8-1.95), and the lubricating layer is formed of a compound selected from the group consisting of polar perfluoropolyethers, non-polar perfluoropolyethers, perfluorocarboxylic acids, phosphazens, perfluoroalkylates and perfluoroacrylate compounds; and a method for producing the recording medium.
| Inventors: | Ueda; Kunihiro (Saku, JP); Nakayama; Masatoshi (Sakura, JP); Yazu; Kiyoshi (Hodonoharano-machi, JP); Kobayashi; Koji (Miyota-machi, JP); Kanazawa; Hiromichi (Saku, JP) |
| Assignee: | TDK Corporation (Tokyo, JP) |
| Appl. No.: | 651902 |
| Filed: | May 21, 1996 |
| Nov 30, 1993[JP] | 5-299682 | |
| Nov 30, 1993[JP] | 5-299683 |
| Current U.S. Class: | 428/336; 427/122; 427/131; 427/249.7; 427/479; 427/488; 427/489; 427/577; 427/578; 427/585; 427/906; 428/408; 428/422; 428/446; 428/457; 428/835.2; 428/900 |
| Intern'l Class: | G11B 005/66 |
| Field of Search: | 428/336,408,446,457,694 TZ,694 TC,900,422,694 TF 427/122,131,249,577,578,585 |
| 4693799 | Sep., 1987 | Yanagihara et al. | 204/165. |
| 4892789 | Jan., 1990 | Nakayama et al. | 428/336. |
| 4925733 | May., 1990 | Imataki et al. | 428/336. |
| 5073785 | Dec., 1991 | Jansen et al. | 346/1. |
| 5182132 | Jan., 1993 | Murai et al. | 427/577. |
| 5232791 | Aug., 1993 | Kohler et al. | 428/694. |
| 5266409 | Nov., 1993 | Schmidt et al. | 428/446. |
| 5275850 | Jan., 1994 | Kitoh et al. | 427/577. |
| 5320875 | Jun., 1994 | Hu et al. | 427/493. |
| 5330852 | Jul., 1994 | Gerstenberg et al. | 428/694. |
| 5352493 | Oct., 1994 | Dorfman et al. | 427/530. |
| 5543203 | Aug., 1996 | Tani et al. | 428/156. |
| Foreign Patent Documents | |||
| 57-135443 | Aug., 1982 | JP. | |
| 57-164432 | Oct., 1982 | JP. | |
| 3-53691 | Aug., 1991 | JP. | |
| 4-341918 | Nov., 1992 | JP. | |
| 5-20663 | Jan., 1993 | JP. | |
| 5-33456 | May., 1993 | JP. | |
McGraw-Hill Encyclopedia of Science & Technology, 7th. edition, McGraw-Hill, Inc., New York, 1992. Van Nostrand's Scientific Encyclopedia, 8th. edition, Van Nostrand Reinhold, New York, 1995. Dictionary of Physics, edited by John Daintith, Barnes & Noble Books, 1981. |
TABLE 1
__________________________________________________________________________
Protective Film (DLC Film) Undercoat layer (SiOx)
Plasma Film Film
Frequency Thickness
Refractive
Contact
Thickness
Value
(kHz)
Bias
Bias V
(.ANG.)
Index
Angle
(.ANG.)
of x
__________________________________________________________________________
Example 1
400 CW -200
100 1.95 77 200 1.9
Example 2
200 CW -200
100 1.97 77 200 1.9
Example 3
100 CW -200
100 1.98 76 200 1.9
Example 4
50 CW -200
100 2.0 75 200 1.9
Example 5
400 pulse
-200
100 1.97 75 200 1.9
Example 6
200 pulse
-200
100 1.98 75 200 1.9
Example 7
100 Pulse
-200
100 2.0 74 200 1.9
Example 8
50 pulse
-200
100 2.1 73 200 1.9
Example 9
400 CW -200
30 1.95 77 200 1.9
Example 10
400 CW -200
50 1.95 77 200 1.9
Example 11
400 CW -200
150 1.95 77 200 1.9
Example 12
400 CW -200
100 1.95 77 300 1.9
Example 13
400 CW -200
100 1.95 77 200 1.8
Example 14
400 CW -200
100 1.95 77 200 1.95
Example 15
400 CW -200
100 1.95 77 200 1.9
Exdmple 16
400 CW -200
100 1.95 77 200 1.9
Example 17
400 CW -200
100 1.95 77 200 1.9
Example 18
400 pulse
-200
100 1.97 75 200 1.9
Example 19
400 pulse
-200
100 1.97 75 200 1.9
Example 20
400 pulse
-200
100 1.97 75 200 1.9
Comparative
-- -- -- -- -- -- -- --
Example 1
Comparative
13.56
CW -200
100 1.7 85 200 1.9
Example 2
Comparative
1 CW -200
100 1.8 82 200 1.9
Example 3
Comparative
500 CW -200
100 1.8 81 200 1.9
Example 4
Comparative
20 CW -200
100 1.95 80 200 1.9
Example 5
Comparative
400 -- 0 100 1.85 83 200 1.9
Example 6
Comparative
200 -- 0 100 1.86 82 200 1.9
Example 7
Comparative
100 -- 0 100 1.87 81 200 1.9
Example 8
Comparative
50 -- 0 100 1.88 80 200 1.9
Example 9
Comparative
400 CW -200
20 1.95 77 200 1.9
Example 10
Comparative
400 CW -200
200 1.95 77 200 1.9
Example 11
Comparative
400 CW -200
100 1.95 77 50 1.9
Example 12
Comparative
400 CW -200
100 1.95 77 100 1.9
Example 13
Comparative
400 CW -200
100 1.95 77 200 1.5
Example 14
Comparative
400 CW -200
100 1.95 77 200 1.7
Example 15
Comparative
400 CW -200
100 1.95 77 200 2.0
Example 16
Comparative
400 pulse
-200
100 1.97 75 200 1.9
Example 17
Comparative
Example 18
400 pulse
-200
100 1.97 75 200 1.9
Comparative
-- -- -- -- -- -- -- --
Example 19
Comparative
400 CW -200
100 1.95 77 200 1.9
Example 20
Comparative
200 CW -200
100 1.95 77 200 1.9
Example 21
Comparative
100 CW -200
100 1.95 77 200 1.9
Example 22
Comparative
50 CW -200
100 1.95 77 200 1.9
Example 23
Comparative
400 pulse
-200
100 1.97 75 200 1.9
Example 24
Comparative
200 pulse
-200
100 1.98 75 200 1.9
Example 25
Comparative
100 pulse
-200
100 2.0 74 200 1.9
Example 26
Comparative
50 pulse
-200
100 2.1 73 200 1.9
Example 27
Comparative
400 CW -200
100 1.95 97 --
Example 28
Comparative
-- -- -- -- -- -- 200 1.9
Example 29
__________________________________________________________________________
Durable Electro-
Corrosion
Initial
Friction
Surface
magnetic
Liquid Lubricant
Still
Resistance
Friction
500 passes
Obser-
Charac-
Name of Material
(min)
(%) (.mu.)
(.mu.) vation
teristics
__________________________________________________________________________
Example 1
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 2
polar PFPE
90 3 0.2 0.33 .smallcircle.
.smallcircle.
Example 3
polar PFPE
90 3 0.2 0.32 .smallcircle.
.smallcircle.
Example 4
polar PFPE
90 3 0.2 0.3 .smallcircle.
.smallcircle.
Example 5
polar PFPE
>120
2 0.15
0.28 .smallcircle.
.smallcircle.
Example 6
polar PFPE
>120
2 0.15
0.27 .smallcircle.
.smallcircle.
Example 7
polar PFPE
>120
2 0.15
0,26 .smallcircle.
.smallcircle.
Example 8
polar PFPE
>120
2 0.15
0.25 .smallcircle.
.smallcircle.
Example 9
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 10
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 11
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 12
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 13
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 14
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 15
non-polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 16
PFA 90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 17
phosphazene
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 18
non-polar PFPE
>120
2 0.15
0.28 .smallcircle.
.smallcircle.
Example 19
PFA >120
2 0.15
0.28 .smallcircle.
.smallcircle.
Example 20
phosphazene
>120
2 0.15
0.28 .smallcircle.
.smallcircle.
Comparative
polar PFPE
0.5 25 0.3 0.65 x .smallcircle.
Example 1
Comparative
polar PFPE
1 15 0.5 0.85 x .smallcircle.
Example 2
Comparative
polar PFPE
5 10 0.35
0.8 x .smallcircle.
Example 3
Comparative
polar PFPE
5 10 0.32
0.65 x .smallcircle.
Example 4
Comparative
polar PFPE
5 10 0.3 0.5 .DELTA.
.smallcircle.
Example 5
Comparative
polar PFPE
2 15 0.25
0.8 x .smallcircle.
Example 6
Comparative
polar PFPE
5 15 0.25
0.75 x .smallcircle.
Example 7
Comparative
polar PFPE
15 10 0.25
0.6 .smallcircle.
Example 8
Comparative
polar PFPE
15 10 0.25
0.5 .DELTA.
.smallcircle.
Example 9
Comparative
polar PFPE
5 10 0.2 0.65 x .smallcircle.
Example 10
Comparative
polar PFPE
90 3 0.2 0.34 .smallcircle.
x
Example 11
Comparative
polar PFPE
90 10 0.2 0.65 x .smallcircle.
Example 12
Comparative
polar PFPE
90 10 0.2 0.65 x .smallcircle.
Example 13
Comparative
polar PFPE
10 15 0.2 0.65 x .smallcircle.
Example 14
Comparative
polar PFPE
10 10 0.2 0.65 x .smallcircle.
Example 15
Comparative
polar PFPE
5 15 0.2 0.3 x .smallcircle.
Example 16
Comparative
fatty acid
2 2 0.35
100 passes
x .smallcircle.
Example 17
Comparative
silicone oil
2 2 0.4 100 passes
x .smallcircle.
Example 18
Comparative
-- 0.5 25 0.5 unmeasurable
x .smallcircle.
Example 19
Comparative
-- 30 3 0.3 0.65 x .smallcircle.
Example 20
Comparative
-- 30 3 0.3 0.65 x .smallcircle.
Example 21
Comparative
-- 30 3 0.3 0.6 5 x .smallcircle.
Example 22
Comparative
-- 30 3 0.3 0.65 x .smallcircle.
Example 23
Comparative
-- 30 3 0.3 0.65 x .smallcircle.
Example 24
Comparative
-- 30 3 0.3 0.65 x .smallcircle.
Example 25
Comparative
-- 30 3 0.3 0.5 .DELTA.
.smallcircle.
Example 26
Comparative
-- 30 3 0.3 0.5 .DELTA.
.smallcircle.
Example 27
Comparative
polar PFPE
30 15 0.25
0.34 .smallcircle.
.smallcircle.
Example 28
Comparative
polar PFPE
0.5 15 0.25
0.65 x .smallcircle.
Example 29
__________________________________________________________________________
TABLE 2
__________________________________________________________________________
Undercoat layer
Protective Film (DLC Film) (SiOx)
Plasma Film Film
Frequency Thickness
Raw Mate-
Refract-
Contact
Thickness
Value
(kHz)
Bias
Bias V
(.ANG.)
rial Gas
ive Index
Angle
(.ANG.)
of x
__________________________________________________________________________
Example 21
400 CW -200
100 methane/H2
1.95 77 200 1.9
Example 22
400 pulse
-200
100 methane/H2
1.97 75 200 1.9
Example 23
400 CW -200
100 ethane
1.95 77 200 1.9
Example 24
400 CW -200
100 ethane/H2
1.95 77 200 1.9
Example 25
400 pulse
-200
100 ethane
1.97 75 200 1.9
Example 26
400 pulse
-200
100 ethane/H2
1.97 75 200 1.9
Example 27
400 CW -200
100 propane
1.95 77 200 1.9
Example 28
400 CW -200
100 propane/H2
1.95 77 200 1.9
Example 29
400 pulse
-200
100 propane
1.97 75 200 1.9
Example 30
400 pulse
-200
100 propane/H2
1.97 75 200 1.9
Example 31
400 CW -200
100 butane
1.95 77 200 1.9
Example 32
400 CW -200
100 butane/H2
1.95 77 200 1.9
Example 33
400 pulse
-200
100 butane
1.97 75 200 1.9
Example 34
400 pulse
-200
100 butane/H2
1.97 75 200 1.9
Example 35
400 CW -200
100 ethylene
1.97 76 200 1.9
Example 36
400 CW -200
100 ethylene/H2
1.97 76 200 1.9
Example 37
400 pulse
-200
100 ethylene
2.0 74 200 1.9
Example 38
400 pulse
-200
100 ethylene/H2
2.0 74 200 1.9
Example 39
400 CW -200
100 acetylene
1.97 76 200 1.9
Example 40
400 CW -200
100 acetylene/H2
1.97 76 200 1.9
Example 41
400 pulse
-200
100 acetylene
2.0 74 200 1.9
Example 42
400 pulse
-200
100 acetylene/H2
2.0 74 200 1.9
__________________________________________________________________________
Durable Electro-
Corrosion
Initial
Friction
Surface
magnetic
Liquid Lubricant
Still
Resistance
Friction
500 passes
Obser-
Charac-
Name of Material
(min)
(%) (.mu.)
(.mu.)
vation
teristics
__________________________________________________________________________
Example 21
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 22
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 23
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 24
polar PFPE
90 3 0.2 0.34 .smallcircle.
.smallcircle.
Example 25
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 26
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 27
polar PFPE
90 3 0.21
0.34 .smallcircle.
.smallcircle.
Example 28
polar PFPE
90 3 0.2i
0.34 .smallcircle.
.smallcircle.
Example 29
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 30
polar PFPE
>120 2 0.15
0.28 .smallcircle.
Example 31
polar PFPE
90 3 0.22
0.35 .smallcircle.
.smallcircle.
Example 32
polar PFPE
90 3 0.22
0.34 .smallcircle.
.smallcircle.
Example 33
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 34
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 35
polar PFPE
100 2 0.18
0.3 .smallcircle.
.smallcircle.
Example 36
polar PFPE
100 2 0.19
0.3 .smallcircle.
.smallcircle.
Example 37
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 38
polar PFPE
>120 2 0.15
0.28 .smallcircle.
.smallcircle.
Example 39
polar PFPE
100 3 0.16
0.3 .smallcircle.
.smallcircle.
Example 40
polar PFPE
100 3 0.16
0.3 .smallcircle.
.smallcircle.
Example 41
polar PFPE
>120 2 0.14
0.25 .smallcircle.
.smallcircle.
Example 42
polar PFPE
>120 2 0.14
0.25 .smallcircle.
.smallcircle.
__________________________________________________________________________
TABLE 3
__________________________________________________________________________
Plasma Flow Pulse
Pulse
Film
Frequency Ratio
Ratio
Frequency
Thickness
Refract-
Contact
(kHz)
Bias
Bias V
(CH.sub.4 /H.sub.2)
(ON/OFF)
Hz (.ANG.)
ive Index
Angle
__________________________________________________________________________
Example 43
400 CW -200
1/3 -- -- 100 1.95 77
Example 44
400 CW -200
1/2 -- -- 100 1.95 77
Example 45
400 CW -200
2/1 -- -- 100 1.95 77
Example 46
400 CW -200
3/1 -- -- 100 1.95 77
Example 47
400 pulse
-200
1/1 1/3 50 100 1.95 79
Example 48
400 pulse
-200
1/1 1/2 50 100 1.95 77
Example 49
400 pulse
-200
1/1 2/1 50 100 1.95 77
Example 50
400 pulse
-200
1/1 3/1 50 100 1.95 77
Example 51
400 pulse
-200
1/1 1/1 10 100 1.95 79
Example 52
400 pulse
-200
1/1 1/1 20 100 1.95 77
Example 53
400 pulse
-200
1/1 1/1 100 100 1.95 77
Example 54
400 pulse
-200
1/1 1/1 200 100 1.95 77
Example 55
400 pulse
-200
1/1 1/1 300 100 1.95 77
Example 56
400 pulse
-200
1/1 1/1 400 100 1.95 77
Example 57
400 pulse
-200
1/1 1/1 500 100 1.95 77
Comparative
400 CW -200
1/4 -- -- 100 1.88 80
Example 30
Comparative
400 CW -200
4/1 -- -- 100 1.9 80
Example 31
Compardtive
400 pulse
-200
1/1 4/1 50 100 1.88 77
Example 32
Comparative
400 pulse
-200
1/1 1/4 50 100 1.85 82
Example 33
Comparative
400 pulse
-200
1/1 1/1 5 100 1.88 80
Example 34
Comparative
400 pulse
-200
1/1 1/1 600 100 1.8 81
Example 35
Comparative
400 pulse
-200
1/1 1/1 1000 100 1.8 81
Example 36
__________________________________________________________________________
Durable
Corrosion
Initial
Friction
Still
Resistance
Friction
500 passes
Surface
Electromagnetic
(min)
(%) (.mu.)
(.mu.) Observation
Characteristics
__________________________________________________________________________
Example 43
90 3 0.25
0.34 .smallcircle.
Example 44
90 3 0.25
0.34 .smallcircle.
.smallcircle.
Example 45
90 3 0.25
0.34 .smallcircle.
.smallcircle.
Example 46
90 3 0.25
0.34 .smallcircle.
.smallcircle.
Example 47
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 48
120 2 0.2 0.34 .smallcircle.
.smallcircle.
Example 49
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 50
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 51
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 52
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 53
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 54
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 55
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 56
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Example 57
120 2 0.2 0.35 .smallcircle.
.smallcircle.
Comparative
10 5 0.3 0.7 x x
Example 30
Comparative
10 10 0.3 0.5 .DELTA.
x
Example 31
Comparative
30 10 0.25
0.55 x x
Example 32
Comparative
5 10 0.3 0.7 x x
Example 33
Comparative
10 5 0.3 0.9 x x
Example 34
Comparative
5 10 0.32
0.6 x x
Example 35
Comparative
5 10 0.32
0.6 x x
Example 36
__________________________________________________________________________
TABLE 4
__________________________________________________________________________
Intercepting Film
Undercoat layer
Protective Film (DLC Film) (SiOx Film)
(SiOx Film)
Plasma Film Film Film
Fre- Thick-
Refrac- Thick- Thick-
quency Bias
ness
tive
Contact
ness
Value
ness
Value
(kHz)
Bias
V (.ANG.)
Index
Angle
(.ANG.)
of x (.ANG.)
of x
__________________________________________________________________________
Example 58
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 59
200 CW -200
50 1.97
77 50 1.90 200 1.90
Example 60
100 CW -200
50 1.98
76 50 1.90 200 1.90
Example 61
50 CW -200
50 2.0 75 50 1.90 200 1.90
Example 62
400 pulse
-200
50 1.97
75 50 1.90 200 1.90
Example 63
200 pulse
-200
50 1.98
75 50 1.90 200 1.90
Example 64
100 pulse
-200
50 2.0 74 50 1.90 200 1.90
Example 65
50 pulse
-200
50 2.1 73 50 1.90 200 1.90
Example 66
400 CW -200
30 1.95
77 50 1.90 200 1.90
Example 67
400 CW -200
80 1.95
77 50 1.90 200 1.90
Example 68
400 CW -200
50 1.95
77 30 1.90 200 1.90
Example 69
400 CW -200
50 1.95
77 80 1.90 200 1.90
Example 70
400 CW -200
50 1.95
77 50 1.80 200 1.90
Example 71
400 CW -200
50 1.95
77 50 1.95 200 1.90
Example 72
400 CW -200
50 1.95
77 50 1.90 150 1.90
Example 73
400 CW -200
50 1.95
77 50 1.90 150 1.90
Example 74
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 75
400 CW -200
50 1.95
77 50 1.90 200 1.95
Example 76
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 77
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 78
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 79
400 pulse
-200
50 1.97
75 50 1.90 200 1.90
Example 80
400 pulse
-200
50 1.97
75 50 1.90 200 1.90
Example 81
400 pulse
-200
50 1.97
75 50 1.90 200 1.90
Example 82
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 83
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 84
400 CW -200
50 1.95
77 100 1.90 200 1.90
Example 85
400 CW -200
100 1.95
77 50 1.90 200 1.90
Comparative
13.51
CW -200
50 1.70
85 50 1.90 200 1.90
Example 37
Comparative
1 CW -200
50 1.80
82 50 1.90 200 1.90
Example 38
Comparative
500 CW -200
50 1.80
81 50 1.90 200 1.90
Example 39
Comparative
20 CW -200
50 1.95
80 50 1.90 200 1.90
Example 40
Comparative
400 -- 0 50 1.85
83 50 1.90 200 1.90
Example 41
Comparative
200 -- 0 50 1.86
82 50 1.90 200 1.90
Example 42
Comparative
100 -- 0 50 1.87
81 50 1.90 200 1.90
Example 43
Comparative
50 -- 0 50 1.88
80 50 1.90 200 1.90
Example 44
Comparative
400 CW -200
20 1.95
77 50 1.90 200 1.90
Example 45
Comparative
400 CW -200
100 1.95
77 100 1.90 200 1.90
Example 46
Comparative
400 CW -200
50 1.95
77 20 1.90 200 1.90
Example 47
Comparative
400 CW -200
50 1.95
77 50 1.50 200 1.90
Example 48
Comparative
400 CW -2 00
50 1.95
77 50 1.70 200 1.90
Example 49
Comparative
400 CW -200
50 1.95
77 50 2.0 200 1.90
Example 50
Comparative
400 CW -200
50 1.95
77 50 1.90 100 1.90
Example 51
Comparative
400 CW -200
50 1.95
77 50 1.90 200 1.50
Example 52
Comparative
400 CW -200
50 1.95
77 50 1.90 200 1.70
Example 53
Comparative
400 CW -200
50 1.95
77 50 1.90 200 2.00
Example 54
Comparative
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 55
Comparative
400 CW -200
50 1.95
77 50 1.90 200 1.90
Example 56
Comparative
Example 57
Comparative
Example 58
-- -- -- -- -- -- -- -- -- --
Comparative
-- -- -- -- -- -- 50 1.90 200 1.90
Example 59
Comparative
400 CW -200
50 1.95
77 -- -- 200 1.90
Example 60
Comparative
400 CW -200
50 1.95
77 50 1.90
Example 61
Comparative
400 CW -200
50 1.95
77 50 SiO.sub.2
200 1.90
Example 62 deposition
Comparative
400 CW -200
50 1.95
77 50 1.90 200 SiO.sub.2
Example 63 deposition
Comparative
400 CW -200
50 1.95
77 50 SiO.sub.2
200 1.90
Example 64 deposition
Comparative
400 CW -200
50 1.95
77 50 1.90 200 SiO.sub.2
Example 65 deposition
__________________________________________________________________________
Durable
Electro-
Still
Still Corrosion
Initial
Friction
magnetic
Liquid Lubricant
-1 dB
-5 dB
Scratch
Resistance
Friction
200 passes
Charac-
Name of Material
(min)
(min)
(mN)
(%) (.mu.)
(.mu.) teristics
__________________________________________________________________________
Example 58
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 59
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 60
polar PFPE
100 >120
80 1 0.25
0.40 .smallcircle.
Example 61
polar PFPE
100 >120
80 1 0.25
0.40 .smallcircle.
Example 62
polar PFPE
>120
>120
120 1 0.15
0.20 .smallcircle.
Example 63
polar PFPE
>120
>120
120 1 0.15
0.20 .smallcircle.
Example 64
polar PFPE
>120
>120
120 1 0.15
0.20 .smallcircle.
Example 65
polar PFPE
>120
>120
120 1 0.15
0.20 .smallcircle.
Example 66
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 67
polar PFPE
100 >120
80 1 0.25
0.40 .smallcircle.
Example 68
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 69
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 70
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 71
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 72
polar PFPE
70 100 75 5 0.25
0.45 .smallcircle.
Example 73
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 74
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 75
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 76
non-polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 77
PFA 90 120 80 1 0.20
0.40 .smallcircle.
Example 78
phosphazene
90 120 80 1 0.25
0.38 .smallcircle.
Example 79
non-polar PFPE
>120
>120
80 1 0.15
0.20 .smallcircle.
Example 80
PFA >120
>120
80 1 0.15
0.20 .smallcircle.
Example 81
phosphazene
>120
>120
80 1 0.15
0.20 .smallcircle.
Example 82
FA108 90 120 80 1 0.25
0.40 .smallcircle.
Example 83
alkylate
90 120 80 1 0.20
0.40 .smallcircle.
Example 84
polar PFPE
90 120 80 1 0.25
0.40 .smallcircle.
Example 85
polar PFPE
90 >120
80 1 0.25
0.40 .smallcircle.
Comparative
polar PFPE
0.5 1 10 13 0.50
0.85 .smallcircle.
Example 37
Comparative
polar PFPE
3 5 20 10 0.35
0.80 .smallcircle.
Example 38
Comparative
polar PFPE
3 5 25 10 0.32
0.60 .smallcircle.
Example 39
Comparative
polar PFPE
3 5 20 10 0.30
0.50 .smallcircle.
Example 40
Comparative
polar PFPE
1 2 15 12 0.35
0.80 .smallcircle.
Example 41
Comparative
polar PFPE
3 5 20 10 0.30
0.50 .smallcircle.
Example 42
Comparative
polar PFPE
3 5 20 10 0.30
0.50 .smallcircle.
Example 43
Comparative
polar PFPE
3 5 20 10 0.30
0.50 .smallcircle.
Example 44
Comparative
polar PFPE
3 5 20 10 0.35
0.60 .smallcircle.
Example 45
Comparative
polar PFPE
100 >120
80 1 0.25
0.40 x
Example 46
Comparative
polar PFPE
30 45 40 5 0.25
0.60 .smallcircle.
Example 47
Comparative
polar PFPE
3 5 20 12 0.25
0.60 .smallcircle.
Example 48
Comparative
polar PFPE
3 5 25 11 0.25
0.50 .smallcircle.
Example 49
Comparative
polar PFPE
1 2 15 15 0.25
0.65 .smallcircle.
Example 50
Comparative
polar PFPE
30 45 35 17 0.25
0.55 .smallcircle.
Example 51
Comparative
polar PFPE
5 10 20 17 0.25
0.65 .smallcircle.
Example 52
Comparative
polar PFPE
5 10 25 15 0.25
0.60 .smallcircle.
Example 53
Comparative
polar PFPE
3 5 20 17 0.25
0.80 .smallcircle.
Example 54
Comparative
fatty acid
1 2 80 1 0.35
100 passes
.smallcircle.
Example 55 stop
Comparative
silicone oil
1 2 80 1 0.40
100 passes
.smallcircle.
Example 56 stop
Comparative
-- 0.5 0.5 -- 25 0.50
unmeasurable
.smallcircle.
Example 57
Comparative
polar PFPE
0.5 0.5 -- 25 0.30
0.60 .smallcircle.
Example 58
Comparative
polar PFPE
3 5 20 10 0.30
0.50 .smallcircle.
Example 59
Comparative
polar PFPE
3 5 20 5 0.30
0.50 .smallcircle.
Example 60
Comparative
polar PFPE
30 45 20 10 0.25
0.60 .smallcircle.
Example 61
Comparative
polar PFPE
5 20 20 10 0.30
100 passes
.smallcircle.
Example 62 stop
Comparative
polar PFPE
5 20 20 10 0.30
100 passes
.smallcircle.
Example 63 stop
Comparative
polar PFPE
10 30 20 10 0.30
150 passes
.smallcircle.
Example 64 stop
Comparative
polar PFPE
10 30 20 10 0.30
150 passes
.smallcircle.
Example 65 stop
__________________________________________________________________________
TABLE 5
__________________________________________________________________________
Intercepting
Protective Film (DLC Film) Film (SiOx)
Plasma Film Film
Frequency Thickness
Refrac-
Contact
Raw Mate-
Thickness
Value
(kHz)
Bias
Bias V
(.ANG.)
tive Index
Angle
rial Gas
(.ANG.)
of x
__________________________________________________________________________
Example 86
400 CW -200
50 1.95 77 methane/H2
50 1.90
Example 87
400 pulse
-200
50 1.97 75 methane/H2
50 1.90
Example 88
400 CW -200
50 1.95 77 ethane
50. 1.90
Example 89
400 CW -200
50 1.95 77 ethane/H2
50 1.90
Example 90
400 pulse
-200
50 1.97 75 ethane
50 1.90
Example 91
400 pulse
-200
50 1.97 75 ethane/H2
50 1.90
Example 92
400 CW -200
50 1.95 77 propane
50 1.90
Example 93
400 CW -200
50 1.95 77 propane/H2
50 1.90
Example 94
400 pulse
-200
50 1.97 75 propane
50 1.90
Example 95
400 pulse
-200
50 1.97 75 propane/H2
50 1.90
Example 96
400 CW -200
50 1.95 77 butane
50 1.90
Example 97
400 CW -200
50 1.95 77 butane/H2
50 1.90
Example 98
400 pulse
-200
50 1.97 75 butane
50 1.90
Example 99
400 pulse
-200
50 1.99 75 butane/H2
50 1.90
Example 100
400 CW -200
50 1.97 76 ethylene
50 1.90
Example 101
400 CW -200
50 1.97 76 ethylene/H2
50 1.90
Example 102
400 pulse
-200
50 2.0 74 ethylene
50 1.90
Example 103
400 pulse
-200
50 2.0 74 ethylene/H2
50 1.90
Example 104
400 CW -200
50 1.97 76 acetylene
50 1.90
Example 105
400 CW -200
50 1.97 76 acetylene/H2
50 1.90
Example 106
400 pulse
-200
50 2.0 74 acetylene
50 1.90
Example 107
400 pulse
-200
50 2.0 74 acetylene/H2
50 1.90
__________________________________________________________________________
Undercoat
layer (SiOx) Corro-
Film sion Durable
Thick- Still
Still Resis-
Initial
Friction
ness
Value
Liquid Lubricant
-1 dB
-5 dB
Scratch
tance
Friction
200 passes
(.ANG.)
of x
Name of Material
(min)
(min)
(mN)
(%) (.mu.)
.mu.)
__________________________________________________________________________
Example 86
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 87
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 88
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 89
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 90
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 91
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 92
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 93
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 94
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 95
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 96
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 97
200 1.90
polar PFPE
100
>120
80 1 0.15
0.20
Example 98
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 99
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 100
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 101
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 102
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 103
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 104
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 105
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 106
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
Example 107
200 1.90
polar PFPE
>120
>120
80 1 0.15
0.20
__________________________________________________________________________
TABLE 6
__________________________________________________________________________
Plasma Flow Pulse
Pulse
Film
Frequency Ratio
Ratio
Frequency
Thickness
Refract-
Contact
(kHz)
Bias
Bias V
(CH.sub.4 /H.sub.2)
(ON/OFF)
Hz (.ANG.)
ive Index
Angle
__________________________________________________________________________
Example 108
400 CW -200
1/3 -- -- 50 1.95 77
Example 109
400 CW -200
1/2 -- -- 50 1.95 77
Example 110
400 CW -200
2/1 -- -- 50 1.95 77
Example 111
400 CW -200
3/1 -- -- 50 1.95 77
Example 112
400 pulse
-200
1/1 1/3 50 50 1.95 77
Example 113
400 pulse
-200
1/1 1/2 50 50 1.95 77
Example 114
400 pulse
-200
1/1 2/1 50 50 1.95 77
Example 115
400 pulse
-200
1/1 3/1 50 50 1.95 77
Example 116
400 pulse
-200
1/1 1/1 10 50 1.95 77
Example 119
400 pulse
-200
1/1 1/1 20 50 1.95 77
Example 118
400 pulse
-200
1/1 1/1 100 50 1.95 77
Example 119
400 pulse
-200
1/1 1/1 200 50 1.95 77
Example 120
400 pulse
-200
1/1 1/1 300 50 1.95 77
Ekample 121
400 pulse
-200
1/1 1/1 400 50 1.95 77
Example 122
400 pulse
-200
1/1 1/1 500 50 1.95 77
Comparative
400 CW -200
1/4 -- -- 50 1.88 80
Example 66
Comparative
400 CW -200
4/1 -- -- 50 1.9 80
Example 67
Comparative
400 pulse
-200
1/1 4/1 50 50 1.88 77
Example 68
Comparative
400 pulse
-200
1/1 1/4 50 50 1.85 82
Example 69
Comparative
400 pulse
-200
1/1 1/1 5 50 1.88 80
Example 70
Comparative
400 pulse
-200
1/1 1/1 600 50 1.8 81
Example 71
Comparative
400 pulse
-200
1/1 1/1 1000 50 1.8 81
Example 72
__________________________________________________________________________
Durable
Still Still
Corrosion
Initial
Friction
-1 dB -5 dB
Resistance
Friction
200 passes
Scratch
Electromagnetic
(min) (min)
(%) (.mu.)
(.mu.) (mN)
Characteristics
__________________________________________________________________________
Example 108
120 90 3 0.25
0.34 80 .smallcircle.
Example 109
120 90 3 0.25
0.34 80 .smallcircle.
Example 110
120 90 3 0.25
0.34 80 .smallcircle.
Example 111
120 90 3 0.25
0.34 80 .smallcircle.
Example 112
>120 120 2 0.2 0.35 90 .smallcircle.
Example 113
>120 120 2 0.2 0.34 100 .smallcircle.
Example 114
>120 120 2 0.2 0.35 120 .smallcircle.
Example 115
>120 120 2 0.2 0.35 120 .smallcircle.
Example 116
>120 120 2 0.2 0.35 90 .smallcircle.
Example 117
>120 120 2 0.2 0.35 100 .smallcircle.
Example 118
>120 120 2 0.2 0.35 120 .smallcircle.
Example 119
>120 120 2 0.2 0.35 120 .smallcircle.
Example 120
>120 120 2 0.2 0.35 120 .smallcircle.
Example 121
>120 120 2 0.2 0.35 120 .smallcircle.
Example 122
>120 120 2 0.2 0.35 120 .smallcircle.
Comparative
30 10 5 0.3 0.7 25 x
Example 66
Comparative
30 10 10 0.3 0.5 25 x
Example 67
Comparative
10 30 10 0.25
0.55 25 x
Example 68
Comparative
30 5 10 0.3 0.7 20 x
Example 69
Comparative
20 10 5 0.3 0.7 20 x
Example 70
Comparative
20 5 10 0.32
0.6 20 x
Example 71
Comparative
20 5 10 0.32
0.6 20 x
Example 72
__________________________________________________________________________