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United States Patent | 5,669,583 |
Roth | September 23, 1997 |
Method and apparatus for covering a free-standing body with a uniform glow discharge plasma, particularly at atmospheric pressure. The method may be used to provide a body coated with such a plasma, and also to treat a workpiece.
Inventors: | Roth; John Reece (Knoxville, TN) |
Assignee: | University of Tennessee Research Corporation (Knoxville, TN) |
Appl. No.: | 254264 |
Filed: | June 6, 1994 |
Current U.S. Class: | 244/130; 244/204; 244/205 |
Intern'l Class: | B64C 001/38 |
Field of Search: | 244/198,203,204,205,130,62 60/203.1 |
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3360220 | Dec., 1967 | Meyer | 244/205. |
3507348 | Apr., 1970 | Aronson | 244/205. |
3510094 | May., 1970 | Clark. | |
4469932 | Sep., 1984 | Spiegelberg. | |
4771730 | Sep., 1988 | Tezuka. | |
4919968 | Apr., 1990 | Buhl et al. | |
5213658 | May., 1993 | Ishida. | |
5270137 | Dec., 1993 | Kubota. | |
Foreign Patent Documents | |||
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58-200529 | Nov., 1983 | JP. | |
61-177374 | Aug., 1986 | JP. | |
62-2544 | Jan., 1987 | JP. | |
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2-312223 | Dec., 1990 | JP. | |
4-225226 | Aug., 1992 | JP. |
Von Engel, A.; Seeliger, R.; and Steenbeck, M. On The Glow Discharge At High Pressure Ziet, fur Physik, vol. 85 (1993) pp. 144-160. EPO Publication No. 0,068,775 Issue Date: Jan. 5, 1983 Inventor: Hata, et al. EPO Publication No. 0,117,561 Issue Date: Sep. 5, 1984 Inventor: Akagi, et al. Wakida, T.; Kawamura, H.; Han, L.; Hwan Kim K.; Gotto, T.; and Takagishi, T. Changes In Surface Properties of Poly(Ethylene Terepathalate) Treated With Low Temperature Plasma: Effect of Pretreatment With Dimethylformamide Sen-I Gakkaishi, vol. 42, No. 2 (1986). Wakida, T.; Kawamura, H.; Song, J.C.; Goto, T.; and Takagishi T. Surface Free Energy of Poly(Ethylene Terepathalate) and Nylon 6 Films Treated With Low Temperature Plasma Sen-I Gakkaishi, vol. 43, No. 7 (1987). Kogoma, M.; Kasai, H.; Takahashi, K.; Moriwaki, T.; and Okazaki, S. Wettability Control of FA Plastic Surface by CF.sub.4 -O.sub.2 Plasma and Its Etching Effect J. Phys. D: Appl. Phys.,vol. 20 (1987). Kanazawa, S.; Kogoma, M.; Moriwaki, T.; and Okazaki, S. Stable Glow Plasma at Atmospheric Pressure J. Phys. D: Appl. Phys., vol. 21 (1988) pp. 838-840. Rakowski, W. Plasma Modification of Wool Under Industrial Conditions Melliand Textilberichte, vol. 70 (1989). Yokoyama, T.; Kogoma, M.; Moriwaki, T.; and Okazaki, S. The Mechanism of the Stabilization of Glow Plasma at Atmospheric Pressure J. Phys. D: Appl. Phys., vol. 23, (1990). Kanda, N.; Kogoma, M.; Jinno, H.; Uchiyama, H.; and Okazaki, S. Atmospheric Pressure Glow Plasma and Its Application to Surface Treatment and Film Deposition International Symposium on Plasma Chemistry, Symposium Proceedings, vol. 3, Bochum, Germany, Aug. 4-9, 1991. Liu, C.; Chen, D.; and Roth, J. R. Characteristics of a Steady-State, Low Power Glow Discharge at Atmospheric Pressure APS Bulletin, vol. 37, No. 6 (1992) p. 1563. Roth, J. R.; Liu, C.; and Laroussi, M. Experimental Generation of a Steady-State Glow Discharge at Atmospheric Pressure Paper 5P-21 Proc. 1992 IEEE International Conference on Plasma Science, Tampa, FL, IEEE Catalog No. 92-TH0460-6, ISBN 0-7803 0716-X (1992), pp. 170-171. Reitz, H.; Schwarz, R.; Salge, J. G. H. Power Modulation for Dielectric Barrier-Discharges Paper presented at Twentieth Power Modulator Symposium, 1992. Rakowski, W. Effect and Cost of Plasma Treatment of Polypropylene Melt Blown Webs Second Annual TANDEC Conference, 13-16 Oct., 1992. M.R. Malik, L.M. Weinstein and M.Y. Hussaini, "Ion Wind Drag Reduction", AIAA 21st Aerospace Sciences Meeting (AIAA-83-0231), Reno, Nevada, Jan. 10-13, 1983. Liu. C. Plasma-Related Characteristics of a Steady-State Glow Discharge at Atmospheric Pressure Presented at the 1993 Sigma XI Graduate Student Paper Competition, The University of Tennessee, Knoxville, Tennessee, Mar. 4, 1993. Roth, J. R.; Spence, P. D.; and Liu, C. Plasma-Related Characteristics of a Steady-State Glow Discharge at Atmospheric Pressure Paper 2P-18, Proc. 1993 IEEE International Conference on Plasma Science, Vancouver, B.C., IEEE Catalog No. 93-CH3334-0 ISBN O-7803-1360-7 (1993), p. 129. Roth, J. R.; Spence, P. D.; and Liu, C. Preliminary Measurements of the Plasma Properties of a One Atmosphere Glow Discharge Plasma Paper presented at 35th Annual Meeting of the APS Division of Plasma Physics, Series II, vol. 38, No. 10 (1993), p. 1901. |