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United States Patent | 5,634,231 |
Nishi | June 3, 1997 |
An apparatus for exposing a substrate chucked on a substrate holder includes a substrate stocking device for stocking a plurality of substrates, a substrate conveying system for picking up the substrate from the substrate stocking device and conveying the substrate to the substrate, holder while chucking a portion of a rear surface of the substrate and a cleaning system for cleaning the rear surface of the substrate.
Inventors: | Nishi; Kenji (Yokohama, JP) |
Assignee: | Nikon Corporation (Tokyo, JP) |
Appl. No.: | 434056 |
Filed: | May 3, 1995 |
May 13, 1994[JP] | 6-099933 |
Current U.S. Class: | 15/102; 15/1.51; 15/77; 15/97.1; 15/309.2; 134/902; 451/289; 451/388 |
Intern'l Class: | H01L 021/027; H01L 021/304; B08B 011/02 |
Field of Search: | 15/1.51,306.1,309.2,97.1,102,21.1,77,88.1 134/153,902 451/289,388 |
4473922 | Oct., 1984 | Weihe | 15/309. |
4811443 | Mar., 1989 | Nishizawa | 15/97. |
5144711 | Sep., 1992 | Gill, Jr. | 15/97. |
5351360 | Oct., 1994 | Suzuki et al. | 15/97. |
5361449 | Nov., 1994 | Akimoto | 15/309. |
5375291 | Dec., 1994 | Tateyama et al. | 15/309. |
Foreign Patent Documents | |||
62-166515 | Jul., 1987 | JP | 134/902. |
62-188323 | Aug., 1987 | JP | 134/902. |
1563789 | May., 1990 | SU | 134/902. |