Back to EveryPatent.com
United States Patent | 5,612,566 |
Williams | March 18, 1997 |
A bidirectional current blocking lateral power MOSFET including a source and a drain which are not shorted to a substrate, and voltages that are applied to the source and drain are both higher than the voltage at which the body is maintained (for an N-channel MOSFET) or lower than the voltage at which the body is maintained (for a P-channel MOSFET). The on-resistance of the MOSFET is improved by decreasing the conductance of the epi region and disposing a thin threshold adjust layer on the surface of the substrate between the source and drain regions. An optional second punchthrough preventing implant is disposed on the substrate surface.
Inventors: | Williams; Richard K. (Cupertino, CA) |
Assignee: | Siliconix incorporated (Santa Clara, CA) |
Appl. No.: | 569334 |
Filed: | December 8, 1995 |
Current U.S. Class: | 257/402; 257/341; 257/348; 257/392; 257/408; 257/655; 257/901; 257/E29.064; 257/E29.255 |
Intern'l Class: | H01L 029/78; H01L 029/86 |
Field of Search: | 257/336,402,392,655,341,124,125,342-345,362,375,335,901,408 |
4256978 | Mar., 1981 | Pinckaers | 307/584. |
4315781 | Feb., 1982 | Henderson | 148/187. |
4404477 | Sep., 1983 | Chao | 307/297. |
4487487 | Dec., 1984 | Janutka | 307/577. |
4491750 | Jan., 1985 | Janutka | 307/577. |
4595847 | Jun., 1986 | Weir | 307/574. |
4630084 | Dec., 1986 | Tihanyi | 257/342. |
4639761 | Jan., 1987 | Singer et al. | 257/336. |
4721986 | Jan., 1988 | Kinzer | 257/336. |
4857984 | Aug., 1989 | Lucas | 357/41. |
5016066 | May., 1991 | Takahashi | 257/341. |
5039877 | Aug., 1991 | Chern | 307/296. |
5148043 | Sep., 1992 | Hirata et al. | 307/66. |
5260594 | Nov., 1993 | Shimuzu | 257/368. |
5306961 | Apr., 1994 | Leo | 307/296. |
5362981 | Nov., 1994 | Sato et al. | 257/371. |
5420451 | May., 1995 | Williams et al. | 257/402. |
5432371 | Jul., 1995 | Denner et al. | 257/360. |
5451533 | Sep., 1995 | Williams et al. | 437/41. |
Foreign Patent Documents | |||
58-165422 | Sep., 1983 | JP | . |
0005070 | Jan., 1989 | JP | 257/342. |
0291468 | Nov., 1989 | JP | 257/342. |
0049266 | Mar., 1991 | JP | 257/342. |