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United States Patent | 5,517,085 |
Engemann ,   et al. | May 14, 1996 |
A low-pressure high-density plasma is excited in a plasma chamber surrounded by a cylindrical inner wall of a ring-shaped waveguide resonator to which the microwave energy is fed by a coupling from a microwave generator. The output coupling of the microwave energy from the standing wave maintained in the waveguide resonator to the plasma chamber is effected through a multiplicity of equispaced slits whose spacing is one half or one waveguide wavelength and which extend parallel to the generatrices of the cylindrical inner wall of the ring-shaped waveguide resonator.
Inventors: | Engemann; Jurgen (Fuhlrottstrasse 48, D-42119, DE); Werner; Frank (Wuppertal, DE) |
Assignee: | Engemann; Jurgen (Wuppertal, DE) |
Appl. No.: | 142667 |
Filed: | October 25, 1993 |
Oct 23, 1992[DE] | 42 35 914 |
Current U.S. Class: | 315/111.21; 118/723AN; 118/723MA; 118/723MW; 204/298.38; 315/111.41; 333/99PL |
Intern'l Class: | H05H 001/46 |
Field of Search: | 315/111.01,111.21,111.41,111.51 118/723 MW,723 MA,723 AN 204/298.37,298.38 156/345 333/99 PL |
3577207 | May., 1971 | Kirjushin | 315/111. |
4810938 | Mar., 1989 | Morsan et al. | 315/111. |
4844007 | Jul., 1989 | Eikelboom | 118/723. |
5063330 | Nov., 1991 | Leprince et al. | 315/111. |
5296784 | Mar., 1994 | Creiseler et al. | 315/111. |
Foreign Patent Documents | |||
0398832 | Nov., 1990 | EP. | |
0564359A1 | Oct., 1993 | EP. | |
2583250 | Dec., 1986 | FR. | |
2668676A2 | Apr., 1992 | FR. | |
4113142A1 | Sep., 1992 | DE. | |
1187824 | Jul., 1989 | JP. | |
132798 | May., 1990 | JP | 315/111. |
3158471 | Jul., 1991 | JP | 204/298. |
4134900A1 | May., 1992 | JP. |
Patent Abstract of Japan; 2-132798(A); "Plasma Generating Equipment And Ion Source Using It"; Aug. 9, 1990; vol. 14/No. 368. |