Back to EveryPatent.com
United States Patent | 5,320,907 |
Sato | June 14, 1994 |
A crystal article comprises a substrate, a plurality of single crystals provided on said substrate with adjacent single crystals contacting each other and a void generation preventive body filling the portion surrounded by said plurality of single crystals.
Inventors: | Sato; Nobuhiko (Atsugi, JP) |
Assignee: | Canon Kabushiki Kaisha (Tokyo, JP) |
Appl. No.: | 704731 |
Filed: | May 20, 1991 |
Oct 02, 1988[JP] | 63-247820 | |
Sep 29, 1989[JP] | 1-255523 |
Current U.S. Class: | 428/446; 257/E21.131; 428/698; 428/699; 428/701; 428/702 |
Intern'l Class: | C30B 019/00 |
Field of Search: | 428/446,698,701,699 437/89,90 |
Re33096 | Oct., 1989 | Iwamatsu | 428/446. |
3617822 | Nov., 1971 | Kobayashi | 437/90. |
4412868 | Nov., 1983 | Brown et al. | 437/89. |
4557794 | Dec., 1985 | McGinn et al. | 156/612. |
4637127 | Jan., 1987 | Kurogi et al. | 437/89. |
4758531 | Jul., 1988 | Beyer et al. | 437/90. |
Foreign Patent Documents | |||
0284433 | Sep., 1988 | EP. |