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United States Patent | 5,306,660 |
Younger ,   et al. | April 26, 1994 |
Method and apparatus for vapor phase free methyl radical transport of indium dopant species for precise predetermined reproducible doping concentrations to control electrical properties for MOCVD grown materials.
Inventors: | Younger; Charles R. (Anaheim Hills, CA); Johnston; Shawn L. (Moorpark, CA); Irvine; Stuart J. C. (Moorpark, CA); Gertner; Edward R. (Moorpark, CA); Hess; Kenneth L. (Yorba Linda, CA) |
Assignee: | Rockwell International Corporation (Seal Beach, CA) |
Appl. No.: | 657692 |
Filed: | February 19, 1991 |
Current U.S. Class: | 438/509; 117/3; 117/89; 117/99; 117/102; 117/104; 117/957; 148/DIG.64; 438/933 |
Intern'l Class: | H01L 021/365 |
Field of Search: | 437/965,971,168,81 148/DIG. 41,DIG. 64 156/DIG. 72,DIG. 82,613,614,606,613 |
4368098 | Jan., 1983 | Manasevit | 156/606. |
4404265 | Sep., 1983 | Manasevit | 148/33. |
4422888 | Dec., 1983 | Statius | 437/965. |
4439267 | Mar., 1984 | Jackson, Jr. | 437/81. |
4504329 | Mar., 1985 | Quinlan et al. | 156/613. |
4566918 | Jan., 1986 | Irvine et al. | 156/613. |
4568397 | Feb., 1986 | Hoke et al. | 437/965. |
4650539 | Mar., 1987 | Irvine et al. | 156/613. |
4804638 | Feb., 1989 | Hoke et al. | 437/965. |
4908329 | Mar., 1990 | Kanai et al. | 148/DIG. |
4950621 | Aug., 1990 | Irvine et al. | 437/81. |
4960728 | Oct., 1990 | Schaake et al. | 148/DIG. |
5202283 | Apr., 1993 | Younger et al. | 437/81. |
Foreign Patent Documents | |||
1-313396 | Dec., 1989 | JP | 156/613. |
2-142145 | May., 1990 | JP | 437/965. |
2-244713 | Sep., 1990 | JP | 156/613. |
Hagihara et al. editors, Handbook of Organometallic Compounds, W. A. Benjamin Inc., 1968, p. 182. |