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United States Patent | 5,292,394 |
Cord ,   et al. | March 8, 1994 |
An evacuable tank having gas inlet and gas outlet openings, with at least one large-area anode at ground potential and a cathode provided as a substrate holder disposed substantially parallel thereto and connected to a high-frequency voltage source. The anode surface has step-shaped areas each being spaced at a different distance from the cathode in order to maintain a uniform ion concentration and therefore a uniform plasma.
Inventors: | Cord; Bernhard (Alzenau, DE); Rauner; Helmut (Nidderau, DE) |
Assignee: | Leybold Aktiengesellschaft (Hanau, DE) |
Appl. No.: | 881530 |
Filed: | May 12, 1992 |
Nov 13, 1991[DE] | 4137257 |
Current U.S. Class: | 204/298.39; 118/723E; 156/345.43; 204/298.02; 204/298.15; 204/298.31; 216/67 |
Intern'l Class: | C23F 001/02 |
Field of Search: | 156/345,643 118/723 204/298.31,298.34,298.02,298.15 |
4425210 | Jan., 1984 | Fazlin | 204/19. |
Foreign Patent Documents | |||
0323620 | ., 1989 | EP. | |
0327253 | ., 1989 | EP. | |
55-12733 | Jan., 1980 | JP | 204/298. |
2026369 | ., 1980 | GB. |