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United States Patent | 5,261,431 |
Ueno ,   et al. | November 16, 1993 |
A washing apparatus includes plural washing vessels each containing a solution for cleaning or washing wafers, a boat housed in each washing vessel to support the wafers and immersed together with the wafers in the chemical solution, and a carrier for carrying the wafers into and out of its corresponding washing vessel. The carrier has a fork for supporting the wafers and loading and unloading them to and from the boat. It further has nozzles for washing and drying the fork.
Inventors: | Ueno; Kinya (Nirasaki, JP); Taniyama; Hiroki (Kofu, JP) |
Assignee: | Tokyo Electron Limited (Tokyo, JP) |
Appl. No.: | 862357 |
Filed: | April 2, 1992 |
Apr 02, 1991[JP] | 3-69808 |
Current U.S. Class: | 134/66; 134/104.1; 134/902 |
Intern'l Class: | B08B 003/02; B08B 003/04; B08B 013/00 |
Field of Search: | 134/902,66,76,77,78,79,104.1,137,140,164,165,196 |
4282825 | Aug., 1981 | Nagatomo et al. | 134/902. |
4924890 | May., 1990 | Giles et al. | 134/902. |
4936328 | Jun., 1990 | Yatabe | 134/902. |
4974619 | Dec., 1990 | Yu | 134/902. |
5177514 | Jan., 1993 | Ushijima et al. | 134/902. |
Foreign Patent Documents | |||
56-29331 | Mar., 1981 | JP. | |
5530 | Jan., 1985 | JP | 134/902. |
2-246116 | Oct., 1990 | JP. |