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United States Patent | 5,260,107 |
Kawamura ,   et al. | November 9, 1993 |
This present invention provides a hard multilayer coated product comprising a hard wear-resistant titanium compound coating layer, a titanium compound layer having a compositional gradient and a self-lubricating coating layer comprising hard amorphous carbon as the principal component successively formed on the surface of a substrate, the first layer being formed at about 500.degree. C. by the plasma CVD method in a vacuum followed by the formation of the second and third layers at 250.degree. to 400.degree. C. in a vacuum maintained at the same level as above. The hard multilayer coated product is improved in wear-resistance and self-lubricity.
Inventors: | Kawamura; Shingo (Asahi, JP); Yamada; Minoru (Kurobe, JP) |
Assignee: | Yoshida Kogyo K.K. (Tokyo, JP) |
Appl. No.: | 861246 |
Filed: | March 31, 1992 |
Apr 08, 1991[JP] | 3-138534 |
Current U.S. Class: | 427/577; 427/249.14; 427/255.7; 427/419.7; 428/698 |
Intern'l Class: | B05D 003/06; C23C 016/00 |
Field of Search: | 427/38,39,249,255.7,419.7,577 428/698 |
4686156 | Aug., 1987 | Baldoni, II et al. | 428/698. |
4774130 | Sep., 1988 | Shiro et al. | 428/216. |
4984940 | Jan., 1991 | Bryant et al. | 407/119. |
5071693 | Dec., 1991 | Sue et al. | 428/212. |
5093151 | Mar., 1992 | Berg et al. | 427/39. |