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United States Patent | 5,128,617 |
Bills | July 7, 1992 |
An ionization gauge and controller therefor where the gauge has a sensitivity which is reproducible gauge to gauge and stable over time in the same gauge. An ionization gauge with a very much lower and a somewhat higher pressure limit than prior art gauges is also disclosed. Elements are also described for launching all electrons in a tight beam in Bayard-Alpert type geometry, so that all the conditions for reproducible and stable sensitivity are satisfied. Elements are also described for collecting all electrons at low energy so that soft X-ray production is negligible.
Inventors: | Bills; Daniel G. (Boulder, CO) |
Assignee: | Granville-Phillips Company (Boulder, CO) |
Appl. No.: | 507579 |
Filed: | April 11, 1990 |
Current U.S. Class: | 324/459; 313/363.1; 324/462 |
Intern'l Class: | G01L 021/32; H05H 015/00 |
Field of Search: | 324/459,462,463,451,464,468,470 313/363.1 315/111.91 250/427 |
3495127 | Feb., 1970 | Lafferty | 324/462. |
3743876 | Jul., 1973 | Redhead | 324/462. |
3839655 | Oct., 1974 | Helgeland et al. | 324/462. |
4093913 | Jun., 1978 | O'Neal, III | 324/462. |
4636680 | Jan., 1987 | Bills et al. | |
4714891 | Dec., 1987 | Morrison, Jr. | |
Foreign Patent Documents | |||
59-102755 | Sep., 1965 | JP. |
K. E. McCulloh & C. R. Tilford, J. Vac. Sci. Technol, 18 994 (1981). L. G. Pittaway, J. Phys. D. Appl. Phys. 3 1113 (1970). K. F. Poulter et al., J. Vac. Sci. Technol. 17 679 (1980). West German Patent DE 3042 172A1. K. F. Poulter et al., Vac/Vol. 31, No. 3, pp. 147-150 (1981). Paul Redhead et al., "Physical Basis of Ultra-High Vacuum", (1968) pp. 234-239. |