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United States Patent | 5,104,276 |
Severns ,   et al. | April 14, 1992 |
A susceptor carrying semiconductor wafers for processing is suspended from a compliant attachment at its upper end and is lowered into a reaction chamber for processing. At the completion of processing, the susceptor is withdrawn vertically to permit a robot to unload the processed wafers and load unprocessed wafers. In order to fix the position of the susceptor during the loading operations, a support carriage is moved into position to engage the lower end of the susceptor. Noxious and corrosive chloride vapors are simultaneously withdrawn from the reaction chamber by a vacuum line attached to the support carriage.
Inventors: | Severns; David W. (Sunnyvale, CA); Tompson; Brian (Campbell, CA); Lindstrom; Paul B. (Aptos, CA); Carlson; David K. (Santa Clara, CA) |
Assignee: | Applied Materials, Inc. (Santa Clara, CA) |
Appl. No.: | 745818 |
Filed: | August 16, 1991 |
Current U.S. Class: | 414/222.03; 118/725 |
Intern'l Class: | C23C 016/00 |
Field of Search: | 414/222,217,416 198/346.3 118/725,730,500 269/40,46,287 204/298.15 |
3850138 | Nov., 1974 | Patano | 118/730. |
3933572 | Jan., 1976 | O'Conner et al. | 65/33. |
4329938 | May., 1982 | Marg | 118/730. |
4496828 | Jan., 1985 | Kusmiesz et al. | 118/730. |
4757890 | Jul., 1988 | Motoda | 414/225. |
4823736 | Apr., 1989 | Post et al. | 118/730. |
4911597 | Mar., 1990 | Maydan et al. | 414/744. |
4928626 | May., 1990 | Carlson et al. | 118/730. |
5038711 | Aug., 1991 | Dan et al. | 118/728. |
Foreign Patent Documents | |||
3639991 | Jun., 1987 | DE. |