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United States Patent | 5,095,518 |
Young ,   et al. | March 10, 1992 |
An integrated optical waveguide is constructed from a lithium niobate (LiNbO.sub.3) crystal substrate. In preferred embodiments, a diffused layer is formed proximate to one surface of the substrate by sputtering a thin layer of a zinc-related oxide (e.g., ZnO, ZnLiNbO.sub.4, or the like) onto the surface and then annealing the substrate. The resulting concentration of zinc in the diffused layer forms a waveguide having desirable optical propagation characteristics. The substrate is preferably congruent lithium niobate. In particularly preferred embodiments, the substrate is magnesium oxide (MgO) doped lithium niobate.
Inventors: | Young; Whu-ming (Stanford, CA); Fejer; Martin M. (Menlo Park, CA); Feigelson; Robert S. (Saratoga, CA); Digonnet; Michel J. F. (Palo Alto, CA) |
Assignee: | The Board of Trustees of the Leland Stanford Junior University (Stanford, CA) |
Appl. No.: | 566153 |
Filed: | August 10, 1990 |
Current U.S. Class: | 385/130 |
Intern'l Class: | G02B 006/10; G02B 006/12 |
Field of Search: | 350/96.11-96.14 |
4759595 | Jul., 1988 | Boord et al. | 350/96. |
4778236 | Oct., 1988 | Miyawaki | 350/96. |
4865407 | Sep., 1989 | Suzuki et al. | 350/96. |
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