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United States Patent | 5,065,698 |
Koike | November 19, 1991 |
A film forming apparatus for forming a film on a substrate set inside a film forming chamber capable of being evacuated comprises; a film forming chanber in which a film is formed on a substrate; a deposit shield member to prevent deposits from being adhered on the inner wall surface of the film forming chamber; a vacuum chamber capable of being evacuated and in which the deposit shield member is changed for new one; an open-shut device provided between the vacuum chamber and the film forming chamber, to keep airtightness between the vacuum chamber and the film forming chamber; and a carrying device to carry the deposit shield member between the vacuum chamber and the film forming chamber.
Inventors: | Koike; Atsushi (Chiba, JP) |
Assignee: | Canon Kabushiki Kaisha (Tokyo, JP) |
Appl. No.: | 674314 |
Filed: | March 25, 1991 |
Apr 11, 1988[JP] | 63-90407 | |
Apr 11, 1989[JP] | 1-91633 |
Current U.S. Class: | 118/719; 118/715; 118/724; 118/733; 204/298.11; 204/298.25 |
Intern'l Class: | C23C 016/00 |
Field of Search: | 118/715,719,724,733 156/345,646 204/192.1,298.11,298.25 414/217 |
3656454 | Apr., 1972 | Schrader | 118/733. |
4666734 | May., 1987 | Kamiya et al. | 118/719. |
4696833 | Sep., 1987 | Monnig et al. | 118/728. |
4699805 | Oct., 1987 | Seelbach et al. | 118/715. |
4763602 | Aug., 1988 | Madan et al. | 118/719. |
4824545 | Apr., 1989 | Arnold et al. | 118/719. |
4825808 | May., 1989 | Takahashi et al. | 118/715. |
Foreign Patent Documents | |||
60-221572 | Nov., 1985 | JP | 118/719. |
61-119672 | Jun., 1986 | JP | 118/719. |
61-231166 | Oct., 1986 | JP | 118/719. |
62-128518 | Jun., 1987 | JP | 118/715. |
62-176986 | Aug., 1987 | JP | 118/719. |
63-157870 | Jun., 1988 | JP | 118/715. |