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United States Patent |
5,046,239
|
Miller
,   et al.
|
September 10, 1991
|
Method of making a flexible membrane circuit tester
Abstract
A pattern of electrodes, with electrical lead lines to the electrodes, are
arried by a thin-film membrane mounted on a frame. The pattern corresponds
to a test point pattern on a circuit to be tested. The lead lines go to
edge connectors on the frame. In order to test a circuit, the membrane is
pushed against the test points by air pressure, such that capacitive
coupling occurs between the electrodes and the test points.
Inventors:
|
Miller; Brian S. (Stafford, VA);
Kaplan; David R. (Burke, VA)
|
Assignee:
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The United States of America as represented by the Secretary of the Army (Washington, DC)
|
Appl. No.:
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658806 |
Filed:
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February 22, 1991 |
Current U.S. Class: |
29/852; 174/254; 216/17 |
Intern'l Class: |
H01K 003/10 |
Field of Search: |
29/852,853,846
156/656,668
174/254,255
324/158 P,158 F
439/482
|
References Cited
U.S. Patent Documents
3405361 | Oct., 1968 | Kattner et al. | 324/158.
|
4566186 | Jan., 1986 | Bauer et al. | 29/852.
|
4891584 | Jan., 1990 | Kamieniecki et al. | 324/158.
|
4908574 | Mar., 1990 | Rhoades et al. | 324/690.
|
4922192 | May., 1990 | Gross et al. | 324/158.
|
4964212 | Oct., 1990 | Deroux-Dauphin et al. | 29/852.
|
5012187 | Apr., 1991 | Littlebury | 324/158.
|
Primary Examiner: Echols; P. W.
Attorney, Agent or Firm: Lee; Milton W., Lane; Anthony T.
Goverment Interests
The invention described herein may be manufactured, used, and licensed by
the U.S. Government for governmental purposes without the payment of any
royalties thereon.
Parent Case Text
This application is a division of application Ser. No. 07/551,370, filed
July 10, 1990.
Claims
We claim:
1. A method of making a flexible membrane tester for a planar electrical
circuit including the steps of:
preparing a frame to hold said membrane;
affixing a relatively thin flexible membrane to said frame;
depositing a plurality of electrodes on one side of said membrane in a
desired pattern;
forming respective holes through said membrane concentric with said
electrodes, but of smaller size than said electrodes;
depositing electrical lead lines on the opposite side of the membrane from
said electrodes, one for each electrode, and extending from a respective
electrode to another region of said membrane;
and forming a high-dielectric layer on the side of each electrode opposite
to the membrane side of the electrode.
Description
BACKGROUND OF THE INVENTION
This invention is in the field of testing devices for integrated electronic
circuits. It is particularly concerned with and arose from the need to
test wafers with infrared detector arrays thereon. Prior to hybridizing
(adding a readout device thereto) it is desirable to test the operability
of the diodes of the array, this is done to eliminate faulty arrays from
further expensive processing. The current technique is to use sharpened
probes to contact indium bumps test points connected on the wafers to the
diodes. This technique has problems of probe alignment with the bumps,
propensity for probe induced damage, and the propensity for probes to
stick to the bumps during contact. If capacitive testing rather than
actual contact is used, it is difficult to maintain a fixed probe distance
from the test points (bumps). The present invention overcomes these
problems by eliminating sharpened probes and employing a thin, flexible
membrane with capacitively-coupled planar probes thereon.
SUMMARY OF THE INVENTION
The invention is embodiments of a tester for infrared diode arrays on a
substrate (chip) and methods of making such testers. The testers include
essentially planar electrodes carried by a flexible membrane which also
carries connecting leads to the probes. In use, the membrane is pressed
against test points on the substrate such that capacitive coupling occurs
between the electrodes and the test points when a test voltage is applied.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a partial cross-sectional view of one embodiment of the
invention.
FIG. 2 is a partial cross-sectional view on another embodiment of the
invention, taken in direction 2--2 on FIG. 4.
FIG. 3 is a partial cross-sectional view of yet another embodiment of the
invention.
FIG. 4 is an isometric view of a simplified version of the invention,
partially cut away.
DESCRIPTION OF PREFERRED EMBODIMENTS OF THE INVENTION
The invention may perhaps be best understood by referring to the drawings.
Regarding the FIG. 1 embodiment, we see (not to scale) a test probe
including a relatively thin film membrane 10 (on the order of a mil thick)
made of a low-dielectric constant material such as Mylar. Atop 10 we see a
portion of lead line 11, which has a portion 11a extending through 10 and
in contact with electrode 12. This electrode is covered with a layer of a
high-dielectric material such as alumina. It should be understood that a
multiplicity of these test probes will be supported by a single membrane,
as will be described in FIG. 4.
Turning now to FIG. 2, we see membrane 20 supporting lead line 21. This
lead line has a portion 21a extending through 20 and with a bottom portion
21b coplanar with the opposite side of 20 from 21. Finally, this coplanar
portion 21b is covered by a high-dielectric constant layer 22.
In FIG. 3, membrane 30 carried lead line 31, with portion 31 extending into
30, and bottom portion 31b. As can be seen, 31a-31b do not extend all the
way through membrane 30.
Looking now at FIG. 4, we see a very simplified version of one embodiment
of the invention. Membrane 20, described above in the FIG. 2 embodiment is
supported by frame 23. Each probe has its lead line extending to the edge
of the frame, where connections to an external test circuit are made. In
an actual embodiment of the invention, it should be understood that dozens
or many hundreds of test probes may be carried by a frame. The physical
size of the frame will be determined by the size of the circuit under
test. The size of the probes is determined by the test point size on the
circuit under test. A typical size is on the order of a mil. The thickness
of the lead lines is not critical, but will be on the order of 1/10
micron.
In use, the circuit or chip under test is held in a testing jig, the
inventive device is placed over the circuit and in registration therewith,
and differential air pressure is applied to cause intimate contact between
the circuit and the device. Obviously, the testing jig will include means
to connect to the various lead lines of the device. The circuit is then
tested by applying appropriate voltages to the various lead lines and
measuring the desired electrical characteristic, such as capacitance or
impedance vs. displacement current.
The methods by which the various embodiments are made are similar in some
respects, but vary in others. All methods begin with the selection or
preparation of a suitable frame in accordance with the circuit to be
tested. The thin membranes is then applied to this frame by any desired
method, such a stretching a layer of the membrane over the frame and
bonding the two together adhesively or otherwise. In the FIG. 1
embodiment, a pattern of electrodes (such as 12 in FIG. 1) is
lithographically applied to the membrane. Holes are then formed through
the membrane from the side opposite to the electrodes, using laser
ablation or lithographic techniques. These holes are concentric with but
of smaller diameter than the electrodes. After a proper lithographic mask
is applied, lead lines (such as 11 in FIG. 1) are deposited, with portions
extending through the membrane and making contact with respective
electrodes. Finally, a high-dielectric constant layer (such as 13 in FIG.
1) is applied over the electrodes by the usual lithographic methods.
In the FIG. 2 embodiment, it is necessary to deposit or apply a removable
layer on one side of the membrane. Holes are then formed through the
membrane from the side opposite the removable layer. After this opposite
side is properly masked, lead lines (such as 21 in FIG. 2) are deposited,
with portion (such as 21a) extending through the membrane to the removable
layer. This removable layer is then removed and a high-dielectric constant
layer is applied to the newly exposed portions of the lead lines (such as
22 in FIG. 2). An example of a material for the removable layer is sodium
silicate, which is differentially soluble. Alternatively, a high
dielectric constant material may be used to initially form the pads 22 on
the membrane, after which holes are formed in the membrane and leads
deposited.
The FIG. 2 embodiment is the simplest to make. Depressions are formed into
the frame-mounted membrane by laser ablation or some lithographic
technique and lead lines are deposited with portion extending into the
depressions by some lithographic technique.
Although the various methods have been described as using lithographic
techniques, it would obviously be possible to employ reusable masks held
against the membrane. Moreover, ion milling and other techniques might be
used for forming holes through or perforations into the membrane. Even
though the invention has been directed to planar devices it would be
possible to use the inventive techniques to form devices capable of
testing non-planar circuits. In this case, a precurved frame might be
employed, or the frame might be formed into its final shape after the
membrane is applied, etc. Also, a flexible frame may be used. Even with a
planar frame, the very nature of the thin membrane with differential air
pressure will permit contacting non planar test points.
A tester made in accordance with the teachings herein has several
advantages over the prior testers for integrated circuits. For example,
since no sharp probes are used, the chance of damage to a circuit is
minimal. Moreover, since no ohmic contact is required, variations in test
readings which might result from improper contact are eliminated. Further,
variations in topography of a circuit under test are automatically
compensated for by the flexibility of the membrane.
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